Electrogrip Company
Since 1985 Electrogrip has provided nanofabrication system support with: electrostatic chucks, high voltage power supplies, control systems, and custom vacuum chambers and hardware.
- 412 247 0992
- 412 362 0991
- mail@electrogrip.com
- 6945 Lynn Way
Pittsburgh, PA 15208
United States of America
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Metal Foil Chucks
Electrostatic chucks are the most reliable solution for gripping delicate, microfabricated metal foils - even in air. These chucks induce no distortion, are easily cleaned, are amazingly robust, economically priced, and exhibit uniform grip forces over their entire area.
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High Temperature Chucks
High temperature electrostatic chucks are available for the ranges -60 to +400 deg. C, and for 350 to 600 deg. C. Different materials and constructions are used in these two ranges.
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Gas Flow Controller
GFC Series
The GFC series enables quick interchange with standard MFCs: same mechanical outline, 4-VCR connectors on standard model, and 15-pin analog connector.
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Glass-Gripping Chucks
Electrogrip is able to grip through one substrate to grip a second masking substrate.
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High Voltage Power Supplies
DR5 Series
The DR5 system comprises: DR5A host controller; and DR5V high-voltage chuck power supply with adaptive grip and release.
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EUV (Extreme UltraViolet) Chucks
Lightweighted and low-expansion chucks with 10nm active-area flatness are required in EUV lithographic tools. These chucks also have low outgassing and low particle generation.
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High Voltage Power Supplies
DR4 Series
The DR4 driver is a high-voltage power supply with *adaptive grip and release; *two bipolar outputs capable of up to +/-6kV continuous output, and* outputs may be floated up to 4kV from ground at plasma bias potential.
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High Voltage Power Supplies
Isolating Power Couplers
Power & Telemetry Isolation: Use these power couplers with the DR5 and DR6 systems ...
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RF Filter
BD3
The BD3 'bias decoupler' filter removes radio-frequency high-voltage chuck signals from chuck powering lines, protecting the high voltage power supply. *
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Electrostatic Chuck
CP Series
'CP' electrostatic chucks all employ a Chuck Puck, bolted onto a Service Base. Standard CP chucks operate between -60 and +120 deg. C.
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Gas Flow Controller
GC-3 Controller
The GC-3 system controller permits an existing system to
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Electrostatic Chucks
Chucks grip for micropatterning, temperature control, or robotics ...*insulating substrates,*hard disk drive head substrates,*semiconductor wafers,*InP-coated sapphire,*metal foils,*... and many other materials.
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Vacuum Systems
Custom vacuum systems, and retrofits into existing systems, are also available.Electrogrip has extensive in-house and customer system design experience ...Mechanical, flow, and thermal simulation;Mechanical design and fabrication;Software system automation.DepEtchPro control software permits rapid automation, without programming:Process systems and robotic motion control are automated with job files and icon setup.Always under user control, hence permitting unlimited field upgrades.
